000 00483nam a2200169Ia 4500
008 170106s2009||||xx |||||||||||||| ||und||
020 _a9781420043761
082 _a621.381
_bFLE
100 _aFleetwood, Daniel M
245 0 _aDefects in Microelectronic Materials and Devices
260 _aBoca Raton
_bCRC Press
_c2009
300 _axvi, 753 p. ; 26 cm
650 _aElectrical Engineering
700 _a Pantelides, Sokrates T
700 _a Schrimpf, Ronald D
942 _cBK
999 _c9782
_d9782