| 000 | 00507nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 170106s2005||||xx |||||||||||||| ||und|| | ||
| 020 | _a9783527314935 | ||
| 082 |
_a620.14 _bLOH |
||
| 100 | _aBaltes, Henry...[et al.] | ||
| 245 | 0 | _aMicroengineering of Metals and Ceramics: Special Replication Techniques, Automation and Properties. Vol No : 4 Advanced Micro & Nanosystems | |
| 260 |
_aGermany _bWiley-VCH Verlag GmbH & Co. KGaA _c2005 |
||
| 300 | _axv, 644 p. ; 24 cm | ||
| 650 | _aEngineering | ||
| 942 | _cBK | ||
| 999 |
_c9449 _d9449 |
||