000 00576nam a2200193Ia 4500
005 20230512101829.0
008 170106s2014||||xx |||||||||||||| ||und||
020 _a9789381269534
_qpbk
041 _aeng
082 _a621.38152
_bOHR.2E
100 _aOhring, Milton
245 0 _aMaterials science of thin films : deposition and structure [2nd ed.]
250 _a2nd ed., 2015, rep. 2014
260 _aNew Delhi
_bElsevier, Reed Elsevier India
_c2015
300 _axxi, 794p. ; 23cm.
653 _aElectronics--Semiconductors
653 _aThin films
942 _cBK
_2ddc
999 _c26852
_d26852