000 00474nam a2200169Ia 4500
008 170106s2006||||xx |||||||||||||| ||und||
020 _a9780849391378
082 _a621.381
_bGAD
100 _aGad-el-Hak, Mohamed
245 0 _aMems handbook : MEMS design and fabrication
250 _a2nd ed.
260 _aBoca raton
_bCRC Press
_c2006
300 _axii, 1-1 -I-11 p. ; 22.5 cm
440 _aMechanical engineering series
650 _aElectrical engg.
942 _cBK
999 _c24234
_d24234