| 000 | 00474nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 170106s2006||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780849391378 | ||
| 082 |
_a621.381 _bGAD |
||
| 100 | _aGad-el-Hak, Mohamed | ||
| 245 | 0 | _aMems handbook : MEMS design and fabrication | |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca raton _bCRC Press _c2006 |
||
| 300 | _axii, 1-1 -I-11 p. ; 22.5 cm | ||
| 440 | _aMechanical engineering series | ||
| 650 | _aElectrical engg. | ||
| 942 | _cBK | ||
| 999 |
_c24234 _d24234 |
||