| 000 | 00404nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 170106s2009||||xx |||||||||||||| ||und|| | ||
| 020 | _a9783540858485 | ||
| 082 |
_a621.044 _bFRA |
||
| 100 | _aFranz, Gerhard | ||
| 245 | 0 | _aLow pressure plasmas and microstructuring technology | |
| 260 |
_aBerlin _bSpringer Verlag _c2009 |
||
| 300 | _axxiv, 732 p. ; 23.5 cm | ||
| 650 | _aMechanical engg. | ||
| 942 | _cBK | ||
| 999 |
_c22328 _d22328 |
||