000 00516nam a2200181Ia 4500
999 _c21854
_d21854
005 20180705122123.0
008 170106s2010||||xx |||||||||||||| ||und||
020 _a9780815515456
_qhb
082 _a670
_bQIN
100 _aQin, Yi
245 0 _aMicro-manufacturing engineering and technology
260 _aAmsterdam
_bElsevier
_c2010
300 _axiv, 414p. ; 25 cm
440 _aMicro and nano technologies series
650 _aMechanical engineering
653 _aManufacturing engineering
942 _cBK
_2ddc