TY  - BOOK
AU  - Campbell, Stephen A.
TI  - The science and engineering of microelectronic fabrication [2nd ed.]
SN  - 9780195681444
U1  - 621.38152 
PY  - 2007///
CY  - New Delhi
PB  - Oxford University Press
KW  - Electrical engineering
KW  - Microelectronic fabrication
KW  - Semiconductor - design and construction
ER  -