Campbell, Stephen A. <br/><br/>
The science and engineering of microelectronic fabrication [2nd ed.] 

 - 2nd ed. Indian ed. rep. 2011 
 - New Delhi  Oxford University Press  2007 
 - xiv, 603p. ; 23 cm 
 - The Oxford series in electrical and computer engineering .
<br/><br/><label>ISBN: </label>9780195681444 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrical engineering
<br/><br/><label>Subjects--Index Terms: </label>Microelectronic fabrication Semiconductor - design and construction 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / CAM.2E