TY  - BOOK
AU  - Ohring, Milton
TI  - Materials science of thin films : deposition and structure [2nd ed.]
SN  - 9789381269534
U1  - 621.38152 
PY  - 2015///
CY  - New Delhi
PB  - Elsevier, Reed Elsevier India
KW  - Electronics--Semiconductors
KW  - Thin films
ER  -