TY  - BOOK
AU  - Baltes, Henry...[et al.]
TI  - Microengineering of Metals and Ceramics: Special Replication Techniques, Automation and Properties. Vol No : 4 Advanced Micro & Nanosystems
SN  - 9783527314935
U1  - 620.14 
PY  - 2005///
CY  - Germany
PB  - Wiley-VCH Verlag GmbH & Co. KGaA
KW  - Engineering
ER  -