TY  - BOOK
AU  - Maissel, Leon I. [ed.]
AU  - Glang, Reinhard [ed.]
TI  - Handbook of thin film technology
SN  - 9780070397422
U1  - 530.4175 
PY  - 1970///
CY  - New York
PB  - McGraw-Hill Book Company
KW  - Engineering and Technology
KW  - Thin film devices -- Design and construction -- Handbooks, manuals, etc
KW  - Thin films -- Handbooks, manuals, etc.
ER  -