TY  - BOOK
AU  - Ghandhi, Sorab K.
TI  - VLSI fabrication principles : silicon and gallium arsenide [2nd ed.]
SN  - 9788126517909
U1  - GHA.2E 621.38171
PY  - 1994///
CY  - New Delhi
PB  - Wiley India
KW  - Electrical engineering
KW  - VLSI
KW  - VLSI fabrication
KW  - Silicon
KW  - Gallium
ER  -