TY  - BOOK
AU  - Newberg, C.
TI  - Contamination and ESD Control in High Technology Manufacturing: 
SN  - 9780470007785
PB  - Wiley-IEEE Press
KW  - Fields, Waves & Electromagnetics
N1  - Book ID : 5201423
UR  - http://ieeexplore.ieee.org/servlet/opac?bknumber=5201423
ER  -