TY  - BOOK
AU  - Gad-el-Hak, Mohamed 
TI  - Mems handbook : MEMS design and fabrication
SN  - 9780849391378
U1  - 621.381 
PY  - 2006///
CY  - Boca raton
PB  - CRC Press
KW  - Electrical engg
ER  -