| 000 | 00430nam a2200157Ia 4500 | ||
|---|---|---|---|
| 005 | 20240322183224.0 | ||
| 008 | 170106s2010||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780080964546 | ||
| 082 |
_a620.50287 _bLEA |
||
| 100 | _aLeach, Richard K. | ||
| 245 | 0 | _aFundamental principles of engineering nanometrology | |
| 260 |
_aAmsterdam _bElsevier _c2010 |
||
| 300 | _axxvi, 321p. ; 24cm. | ||
| 653 | _aNanometrology | ||
| 942 |
_cBK _2ddc |
||
| 999 |
_c9484 _d9484 |
||