| 000 | 00534nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 191030s9999 xx 000 0 und d | ||
| 020 | _a9780470649671 | ||
| 100 | _aLee, K. | ||
| 245 | 0 | _aPrinciples of MEMS: | |
| 260 | _bWiley-IEEE Press | ||
| 500 | _aBook ID : 5628438 | ||
| 653 | _a Engineered Materials, Dielectrics & Plasmas | ||
| 653 | _a Power, Energy, & Industry Applications | ||
| 653 | _aComponents, Circuits, Devices & Systems | ||
| 856 | _uhttp://ieeexplore.ieee.org/servlet/opac?bknumber=5628438 | ||
| 942 | _cEB | ||
| 999 |
_c33164 _d33164 |
||