| 000 | 00596nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 170106s2011||||xx |||||||||||||| ||und|| | ||
| 020 |
_a9781574447293 _q hb |
||
| 041 | _aeng | ||
| 082 |
_a621.395 _bLEE |
||
| 100 | _aLee, El-Hang | ||
| 245 | 0 | _aVLSI micro- and nanophotonics : science, technology, and applications | |
| 260 |
_aBoca Raton _bCRC Press _c2011 |
||
| 300 | _avarious pagings ; 26 cm. | ||
| 650 | _aMicroelectromechanical systems--Technological innovations | ||
| 700 | _a Eldada, Louay A. | ||
| 700 | _a Jagadish, Chennupati | ||
| 700 | _a Razeghi, Manijeh | ||
| 942 | _cBK | ||
| 999 |
_c26504 _d26504 |
||