| 000 | 00470nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 170106s2009||||xx |||||||||||||| ||und|| | ||
| 020 | _a9783540858485 | ||
| 082 |
_a621.044 _bFRA |
||
| 100 | _aFranz, Gerhard | ||
| 245 | 0 | _aLow pressure plasmas and microstructuring technology | |
| 260 |
_aBerlin _bSpringer-Verlag _c2009 |
||
| 300 | _axii, 732 p. ; 24.3 cm | ||
| 650 | _aMechanical engineering ; Technology of Surface coating | ||
| 653 | _aME660/ME460 | ||
| 942 | _cBK | ||
| 999 |
_c24060 _d24060 |
||