| 000 | 00477nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 170106s2012||||xx |||||||||||||| ||und|| | ||
| 020 | _a9781420055115 | ||
| 082 |
_a681.2 _bMAD&V.1 |
||
| 100 | _aMadou, Marc J. | ||
| 245 | 0 | _aFundamentals of microfabrication and nanotechnology. V.1. From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications | |
| 250 | _a3rd ed. | ||
| 260 |
_aBoca Raton _bCRC Press _c2012 |
||
| 300 | _axiii, 641p. ; 29 cm. | ||
| 942 | _cBK | ||
| 999 |
_c19946 _d19946 |
||