000 | 00473nam a2200145Ia 4500 | ||
---|---|---|---|
008 | 170106s2012||||xx |||||||||||||| ||und|| | ||
020 | _a9781420055160 | ||
082 |
_a681.2 _bMAD |
||
100 | _aMadou, Marc J. | ||
245 | 0 | _aFundamentals of microfabrication and nanotechnology. V.3. From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications | |
250 | _a3rd ed. | ||
260 |
_aBoca Raton _bCRC Press _c2012 |
||
300 | _axiii, 636p. ; 29 cm. | ||
942 | _cBK | ||
999 |
_c19081 _d19081 |