TY  - BOOK
AU  - Sze, S. M.
TI  - VLSI technology [2nd ed.]
SN  - 9780070582910
U1  - 621.38173 
PY  - 2003///
CY  - New Delhi
PB  - Tata McGraw-Hill
KW  - Electrical engineering
KW  - VLSI
KW  - Integrated circuits
ER  -