Franz, Gerhard <br/><br/>
Low pressure plasmas and microstructuring technology 

 - Berlin  Springer Verlag  2009 
 - xxiv, 732 p. ; 23.5 cm 
<br/><br/><label>ISBN: </label>9783540858485 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical engg.
<br/><br/><label>Dewey Class. No.: </label>621.044  / FRA