TY  - BOOK
AU  - Brodie, Ivor
AU  - Muray, Julius J.
TI  - Physics of micro/nano-fabrication
SN  - 9788184894134
U1  - 621.381 
PY  - 2010///
CY  - New Delhi
PB  - Springer
KW  - Electrical engg
ER  -