Brodie, Ivor <br/><br/>
Physics of micro/nano-fabrication 

 - New Delhi  Springer  2010 
 - xix, 650 p. ; 23.5 cm 
 - Microdevices : physics and fabrication technologies .
<br/><br/><label>ISBN: </label>9788184894134 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrical engg.
<br/><br/><label>Dewey Class. No.: </label>621.381  / BRO