TY  - BOOK
AU  - Lee, K.
TI  - Principles of MEMS: 
SN  - 9780470649671
PB  - Wiley-IEEE Press
KW  -  Engineered Materials, Dielectrics & Plasmas
KW  -  Power, Energy, & Industry Applications
KW  - Components, Circuits, Devices & Systems
N1  - Book ID : 5628438
UR  - http://ieeexplore.ieee.org/servlet/opac?bknumber=5628438
ER  -