Lee, K. <br/><br/>
Principles of MEMS:  

 -  Wiley-IEEE Press 
<br/><br/> Book ID : 5628438 
<br/><br/><label>ISBN: </label>9780470649671 
<br/><br/><label>Subjects--Index Terms: </label>Engineered Materials, Dielectrics & Plasmas  Power, Energy, & Industry Applications  Components, Circuits, Devices & Systems