TY  - BOOK
AU  - Lee, El-Hang 
AU  -  Eldada, Louay A. 
AU  -  Jagadish, Chennupati 
AU  -  Razeghi, Manijeh 
TI  - VLSI micro- and nanophotonics : science, technology, and applications
SN  - 9781574447293 
U1  - 621.395 
PY  - 2011///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectromechanical systems--Technological innovations
ER  -