TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication and nanotechnology. V.2. Manufacturing techniques for microfabrication and nanotechnology
SN  - 9781420055191
U1  - 681.2 
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
ER  -