TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication and nanotechnology. V.3. From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications
SN  - 9781420055160
U1  - 681.2 
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
ER  -