Madou, Marc J. <br/><br/>
Fundamentals of microfabrication and nanotechnology. V.3. From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications 

 - 3rd ed. 
 - Boca Raton  CRC Press  2012 
 - xiii, 636p. ; 29 cm. 
<br/><br/><label>ISBN: </label>9781420055160 
<br/><br/><label>Dewey Class. No.: </label>681.2  / MAD