Madou, Marc J. Fundamentals of microfabrication and nanotechnology. V.3. From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications - 3rd ed. - Boca Raton CRC Press 2012 - xiii, 636p. ; 29 cm. ISBN: 9781420055160 Dewey Class. No.: 681.2 / MAD