Low pressure plasmas and microstructuring technology
Franz, Gerhard
Low pressure plasmas and microstructuring technology - Berlin Springer-Verlag 2009 - xii, 732 p. ; 24.3 cm
9783540858485
Mechanical engineering ; Technology of Surface coating
ME660/ME460
621.044 / FRA
Low pressure plasmas and microstructuring technology - Berlin Springer-Verlag 2009 - xii, 732 p. ; 24.3 cm
9783540858485
Mechanical engineering ; Technology of Surface coating
ME660/ME460
621.044 / FRA