Low pressure plasmas and microstructuring technology
Franz, Gerhard
Low pressure plasmas and microstructuring technology - Berlin Springer Verlag 2009 - xxiv, 732 p. ; 23.5 cm
9783540858485
Mechanical engg.
621.044 / FRA
Low pressure plasmas and microstructuring technology - Berlin Springer Verlag 2009 - xxiv, 732 p. ; 23.5 cm
9783540858485
Mechanical engg.
621.044 / FRA