Fundamentals of microfabrication and nanotechnology. V.1. From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications
Madou, Marc J.
Fundamentals of microfabrication and nanotechnology. V.1. From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications - 3rd ed. - Boca Raton CRC Press 2012 - xiii, 641p. ; 29 cm.
9781420055115
681.2 / MAD&V.1
Fundamentals of microfabrication and nanotechnology. V.1. From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications - 3rd ed. - Boca Raton CRC Press 2012 - xiii, 641p. ; 29 cm.
9781420055115
681.2 / MAD&V.1