Fundamentals of microfabrication and nanotechnology. V.3. From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications
Madou, Marc J.
Fundamentals of microfabrication and nanotechnology. V.3. From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications - 3rd ed. - Boca Raton CRC Press 2012 - xiii, 636p. ; 29 cm.
9781420055160
681.2 / MAD
Fundamentals of microfabrication and nanotechnology. V.3. From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications - 3rd ed. - Boca Raton CRC Press 2012 - xiii, 636p. ; 29 cm.
9781420055160
681.2 / MAD